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Hitachi Scanning Electron Microscopes SU3800/SU3900
Performance & Power in a Flexible Platform
Hitachi High-Tech's scanning electron microscopes SU3800/SU3900 deliver both operability and expandability. The operator can automate many operations and efficiently utilize their high performance. The SU3900 is equipped with a large multipurpose specimen chamber to accommodate observation of large samples.
Product Features
Substantially Larger Specimen Chamber Accommodates Oversized and Heavy Samples
Robust Stage for Flexibility in Sample Size, Shape, and Weigh
Increased Viewing Area—SEM MAP Expands the Boundaries of Sample Navigation
Evolution of the Market—Improved Automatic Functions for Operators of Any Skill Level
Multiple Modes of Operation
Automatic Functions for Operators of Any Skill Level
- Improved auto algorithms—3X faster (compared with the Hitachi Model S-3700N)
Multi Zigzag enables wide-area observation across multiple areas.
Report Creator generates reports of acquired data.
Integrated Solutions for Various Applications
A Variety of Accessories Mountable onto Any of the 20 Ports in the Innovative SU3900 Specimen Chamber.
SEM/EDS Integration System*
High Sensitivity Detectors Supporting All Observation Requirements
STEM Holder
3D Modeling Software: Hitachi map 3D*
Image Processing, Measurement, and Analysis Software: Image-Pro for Hitachi
Product Specifications: SU3800 & SU3900 Scanning Electron Microscopes
|
Items |
SU3800 |
SU3900 |
|---|---|---|
|
Secondary Electron Resolution |
3.0 nm (30 kV, WD=5 mm, high vacuum) 15.0 nm (1 kV, WD=5 mm, high vacuum) |
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|
Backscattered Electron Resolution |
4.0 nm (30 kV, WD=5 mm, low vacuum) |
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|
Magnification |
×5 to ×300,000 (image size*1) ×7 to ×800,000 (actual display*2) |
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|
Accelerating Voltage |
0.3 kV to 30 kV |
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|
Low Vacuum Mode Setting |
6 to 650 Pa |
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|
Image Shift |
± 75 µm (WD＝10 mm) |
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|
Maximum Specimen Size |
Φ 200 mm |
Φ 300 mm |
|
Specimen Stage Movement |
X: 0 to 100 mm Y: 0 to 50 mm Z: 5 to 65 mm R: 360° continuous T: -20 to +90° |
X: 0 to 150 mm Y: 0 to 150 mm Z: 5 to 85 mm R: 360° continuous T: -20 to +90° |
|
Maximum Movable Range |
Φ 130 mm (in combination with R) |
Φ 200 mm (in combination with R) |
|
Maximum Movable Height |
80 mm (WD= 10 mm) |
130 mm (WD= 10 mm) |
|
Motor Drive |
5-axis motor drive |
5-axis motor drive |
|
Electron Optics |
Pre-centered cartridge type tungsten hairpin filament, 4-hole movable objective-lens aperture |
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|
Detectors |
Secondary electron detector, sensitive semiconductor backscattered electron detector |
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|
WD for EDX analysis |
WD＝10 mm (T.O.A＝35°) |
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|
Auto-Axis Alignment |
Beam control (AFS→ABA→AFC→ABCC) Auto optical axis adjustment (current alignment) Auto beam brightness |
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|
Auto Image Adjustment |
Auto brightness/contrast (ABCC) Auto focus (AFC) Auto stigma/focus (ASF) Auto filament saturation (AFS) Auto beam alignment (ABA) Auto start (HV-ON→ABCC→AFC) |
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|
Operation Auxiliary Functions |
Raster rotation, dynamic focus, image improvement, data input (point-to-point, angle, texts), preset magnification, Stage positioning navigation (SEM MAP), beam marking |
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|
Optional Functions |
Hardware: Track ball, Joystick, Operation panel, Compressor, Ultra sensitive low vacuum detector (UVD), Chamber scope, Camera navigation system Software: SEM data manager, External communication interface, 3D-capture, Stage free mode, EDS integration |
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|
Options (External Devices) |
Energy dispersive X-ray spectrometry (EDS), Wavelength dispersive X-ray spectrometry (WDS), Various external stages (heating, cooling, tensile) |
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*1: Set magnification with 127 mm x 95 mm (4" x 5" picture size) as display size.
*2: Set magnification with 509.8 mm x 286.7 mm (1,920 x 1,080 pixels) as display size.